Application Note: Selecting MEMS Inclinometers for Industrial, Structural & Robotic Systems

Time: Aug 07 2025 Source: Analog Technologies, Inc. Author: fang Click:

1. Introduction

MEMS inclinometers deliver precision tilt measurement for critical industrial, structural, and robotic applications. This guide assists users in selecting optimal sensors from AIT Sensing’s portfolio based on application requirementsenvironmental conditions, and integration needs. Key selection factors include range, accuracy, output type, and ruggedization, with expanded options for cost-sensitive deployments.

2. MEMS Inclinometer Selection Guide

2.1 Range Selection

Application Recommended Range Product Selection & Rationale
Robotic arms/mobile AGVs ±180° (full orient) TS-6613-R02-485±180° range for joint rotation; auto-calibration corrects AGV misalignment.
Structural monitoring ±5° to ±15° TS-6423-R03-4850.01° accuracy detects micro-deflections in bridges.
Industrial cranes ±30° to ±45° TS-3420-R01-CAN:CAN bus ensures EMI immunity; compliant with ISO 9001 and ISO26262.
Solar trackers (cost-opt.) ±60°–90° TS-2322-R04-10V:Dual-axis 0–10V analog; reduces system costs while meeting CE IEC 61326-1:2021.
Geotechnical boreholes ±1° (high prec.) TS-6623-R06-024: 0.001° resolution for soil creep monitoring.
General monitoring ±90° TS-2312-R03-485: Single-axis Modbus; *IP67-rated with industry-leading cost efficiency*.
Key Insight: Narrow ranges (±1°–15°) maximize micro-movement sensitivity; wide ranges (±90°) suit dynamic systems.

2.2 Accuracy Requirements

Criticality Accuracy Product Selection & Advantage
Ultra-high precision ±0.001°–0.005° TS-9827-R02: Differential DAC nullifies temperature drift.
Robotic control ±0.01°–0.2° TS-6613-R02-485: OTA updates adapt to joint wear.
Industrial safety ±0.1°–0.2° TS-3420-R01-CAN: ±0.1° accuracy at ±60°; meets safety standards.
Solar farm leveling ±0.2° TS-2322-R04: Maintains panel alignment within <3% energy loss.
General monitoring ±0.2°–1° TS-2312-R02-485: Reliable detection of >1° tilts in tanks/silos.

2.3 Output Type Selection

Output Type Best For Product Selection & Benefit
Analog (0–10V) Budget solar trackers TS-2322-R04-10VTS 2312 R05 420: Direct PLC interface (no converters required).
RS-485/Modbus® Multi-sensor networks TS-2312-R03-485: Daisy-chains 32+ nodes.
CAN bus Automotive/mobile equip. TS-3420-R01-CAN: J1939 compliant.
4–20mA/0–24mA PLCs/harsh environments TS-6623-R06-024: Intrinsically safe for hazardous areas.

2.4 Connector & Protection

Environment IP Rating Product Selection & Robustness
Robotic joints IP67 TS-6613-R02-485 or IMU1221 R02 232: Resists oil/coolant immersion.
Solar farms IP67 TS-2322-R04TS 2312 R05 420: Magnesium alloy withstands UV degradation.
Corrosive chemicals IP67+SS316 TS-6623-R06: Magnesium alloy housing with Optional stainless steel housing.
Agricultural IP67 TS-2312 Series (TS 2312 R01 CAN, TS 2312 R02 485, TS 2312 R03 485, TS 2312 R05 420): Resists fertilizer corrosion.

3. Application-Specific Recommendations

  • Structural Health Monitoring: Product: TS-6423-R03-485 Why? 100Hz bandwidth captures vibration modes; ±0.01° accuracy detects 0.1mm/m deflection.
  • Geotechnical Monitoring: Product: TS-6623-R06-024 Why? 0.001° resolution tracks sub-millimeter soil movement; 0–24mA output for long cable runs.
  • Industrial Machinery Safety: Product: TS-3420-R01-CAN Why? <10ms response for anti-tip shutdown; 2000g shock rating.
  • Renewable Energy (Cost-Optimized): Product: TS-2322-R04-10V Why? 0.2° accuracy maintains energy yield; –40°C to +85°C operation; >50% cost savings vs. precision models.
  • Robotic Systems:
    • Dual-Axis: TS-6423-R03-485,or IMU1221 R02 232: (10,000g shock rating)
    • Single-Axis: TS-6613-R02-485 or IMU1221 R02 232: (Auto-calibration for AGV tire wear)
  • General Monitoring: Product: TS-2312-R02-485 Why? ±0.2° accuracy for silos/tanks; compact size for retrofits; lowest ownership cost.

4. Integration Best Practices

4.1 Mounting

  • Solar Trackers: Mount TS-2322-R04 on panel frame (tolerates 0.5° misalignment).
  • Silos/Conveyors: Vertically mount TS-2312 with M4 screws + silicone sealant.

4.2 Wiring & Calibration

Challenge Recommended Solution
Analog signal noise Shielded cables <10m + RC filter.
Field recalibration Use AIT Debug Assistant (free tool).
Robotic cabling FPC ribbons for arms; IP67 coiled cables for AGVs.

4.3 Data Acquisition

Output Integration Tip
RS-485/Modbus Add 120Ω termination + STP cables.
4–20mA 250Ω shunt resistor or customer selection. Normally no need.
CAN bus Enable heartbeat messages. Normally no need.

5. Troubleshooting & Support

Symptom Solution
Signal drift Enable auto-compensation.
Output saturation Restart to resolve.
CAN bus errors Restart to clear.
Support: Lifetime calibration via support @analogtechnologies.com

6. Conclusion

  • Precision Applications: TS-9827-R02 (±0.001°) for bridges/dams.
  • Cost-Sensitive DeploymentsTS-2322 (solar) & TS-2312 (monitoring) deliver 0.2° accuracy at disruptive value.
  • Robotics/Networking: TS-6613-R02 (auto-calibration) and TS-3420-R01-CAN (CAN bus).
AIT Advantages:
  • 90,000-hour MTBF (all models)
  • Free Test Software Suite
  • Volume pricing programs
  • OEM ODM allowed from logo to package